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Bibliographic Record
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- Material Type
- 記事
- Author/Editor
- 寒川 雅之安部 隆
- Series Title
- Alternative Title
- Fabrication of Multi-layer Micro-cantilever Structure and Its Application to Miniature Sensor Devices
- Periodical title
- 電気学会研究会資料. TER = The papers of Technical Meeting on "Transportation and Electric Railway", IEE Japan / 交通・電気鉄道研究会 [編]
- No. or year of volume/issue
- 2015(1-15):2015.3.18
- Volume
- 2015
- Issue
- 1-15