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Bibliographic Record
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- Material Type
- 記事
- Title
- Author/Editor
- 渡部 善幸矢作 徹阿部 泰村山 裕紀
- Alternative Title
- Electromagnetic Silicon MEMS Resonator
- Periodical title
- 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]
- No. or year of volume/issue
- 34:2017.10.31-11.2
- Volume
- 34
- Pages
- 1-5
- Publication date of volume/issue (W3CDTF)
- 2017