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Bibliographic Record
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- Material Type
- 記事
- Author/Editor
- 島 宏美内田 寛中嶋 宇史岡村 総一郎福田 翔太郎亀井 利久
- Series Title
- Alternative Title
- Study of Ferroelectric Films for the Development of Phase Shifter in Microwave and Millimeter Wave Band : The Optimization of Deposition Conditions
- Periodical title
- 電子情報通信学会技術研究報告 = IEICE technical report : 信学技報
- No. or year of volume/issue
- 117(291):2017.11.9・10
- Volume
- 117
- Issue
- 291