μ-PCD法によるエピタキシャルウェーハ評価の精度に関する検討 (電子デバイス 半導体電力変換合同研究会 パワーデバイス・パワーエレクトロニクスとその実装技術)
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- Material Type
- 記事
- Author/Editor
- 真辺 航大村 一郎附田 正則
- Series Title
- Alternative Title
- Investigation of Epitaxial Wafer Evaluation Accuracy with Microwave Photoconductivity Decay
- Periodical title
- 電気学会研究会資料. EDD = The papers of technical meeting on electron devices, IEE Japan / 電子デバイス研究会 [編]
- No. or year of volume/issue
- 2017(52-65・67-73):2017.11.20
- Volume
- 2017
- Issue
- 52-65・67-73