コンピュータシミュレーションによる粉体および線材へのイオン注入分布の一般則 (小特集 第58回真空に関する連合講演会論文集)
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- Material Type
- 記事
- Author/Editor
- 田原 憧太郎山本 幸男荒川 正和西城 理志堀川 隼世米田 知晃
- Series Title
- Alternative Title
- Universal Expression of Projected Range Distributions for Spherical and Cylindrical Shape Target by Computer Simulation
- Periodical title
- Journal of the Vacuum Society of Japan = 真空
- No. or year of volume/issue
- 60(12):2017.12
- Volume
- 60
- Issue
- 12