Bibliographic Record
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- Material Type
- 記事
- Author/Editor
- 川原崎 匠梅原 直己名嘉真 朝泰小南 裕子原 和彦
- Series Title
- Alternative Title
- Thin Film Formation Mechanism of Hexagonal Boron Nitride on c-Plane Sapphire Substrates by Low Pressure CVD
- Periodical title
- 電子情報通信学会技術研究報告 = IEICE technical report : 信学技報
- No. or year of volume/issue
- 117(411):2018.1.25・26
- Volume
- 117
- Issue
- 411