微粒子投射処理と硬質薄膜形成の複合処理について (特集 機能性炭素系コーティングのトライボロジー)
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- Material Type
- 記事
- Author/Editor
- 熊谷 正夫
- Series Title
- Author Heading
- Alternative Title
- Combined Treatment of Fine Particle Bombarding and Hard Thin Film Coating
- Periodical title
- トライボロジスト = Journal of Japanese Society of Tribologists / 日本トライボロジー学会 編
- No. or year of volume/issue
- 63(1):2018
- Volume
- 63
- Issue
- 1