Holdings of Libraries in Japan
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Bibliographic Record
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- Material Type
- 記事
- Author/Editor
- 望月 和浩紀 世陽小杉 亮治米澤 喜幸奥村 元
- Series Title
- Alternative Title
- Topography Simulation of SiC-Chemical-Vapor-Deposition Trench Filling
- Periodical title
- 電気学会研究会資料. EDD = The papers of technical meeting on electron devices, IEE Japan / 電子デバイス研究会 [編]
- No. or year of volume/issue
- 2018(32-42):2018.3.26・27
- Volume
- 2018
- Issue
- 32-42