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雑誌電気学会研究会資料 OQD
Volume number2018(22-30):2018.3.28
ArticleNewSUBARUに...

NewSUBARUにおける汎用X線微細加工ビームライン(BL11) (光・量子デバイス研究会 微細加工技術とバイオ・メディカル応用)

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NewSUBARUにおける汎用X線微細加工ビームライン(BL11)

(光・量子デバイス研究会 微細加工技術とバイオ・メディカル応用)

Call No. (NDL)
Z43-236
Bibliographic ID of National Diet Library
028999547
Material type
記事
Author
竹内 雅耶ほか
Publisher
東京 : 電気学会
Publication date
2018-03-28
Material Format
Paper
Journal name
電気学会研究会資料. OQD = The papers of technical meeting on optical and quantum devices, IEE Japan / 光・量子デバイス研究会 [編] 2018(22-30):2018.3.28
Publication Page
p.13-15
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Paper

Material Type
記事
Title
NewSUBARUにおける汎用X線微細加工ビームライン(BL11)
Author/Editor
竹内 雅耶
山口 明啓
内海 裕一
Series Title
光・量子デバイス研究会 微細加工技術とバイオ・メディカル応用
Author Heading
竹内 雅耶
山口 明啓
内海 裕一
Alternative Title
General-purpose x-ray microfabrication beamline (BL11) constructed at NewSUBARU
Periodical title
電気学会研究会資料. OQD = The papers of technical meeting on optical and quantum devices, IEE Japan / 光・量子デバイス研究会 [編]
No. or year of volume/issue
2018(22-30):2018.3.28
Volume
2018
Issue
22-30