雑誌実験力学 : Journal of JSEM : Journal of the Japan Society for Experimental Mechanics
Volume number18巻1号 2018年3月
Article光プローブを用いた形...

光プローブを用いた形状測定の高精度化 (特集 光応用計測における高精度化手法)

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光プローブを用いた形状測定の高精度化(特集 光応用計測における高精度化手法)

Call No. (NDL)
Z74-C355
Bibliographic ID of National Diet Library
028999638
Material type
記事
Author
澤野 宏
Publisher
東京 : 日本実験力学会
Publication date
2018-03
Material Format
Paper
Journal name
実験力学 : Journal of JSEM : Journal of the Japan Society for Experimental Mechanics / 日本実験力学会編集委員会 編 18(1):2018.3
Publication Page
p.3-9
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Material Type
記事
Title
光プローブを用いた形状測定の高精度化
Author/Editor
澤野 宏
Series Title
特集 光応用計測における高精度化手法
Author Heading
澤野 宏
Alternative Title
Improvement of Profile Measurement Accuracy using Optical Probe
Periodical title
実験力学 : Journal of JSEM : Journal of the Japan Society for Experimental Mechanics / 日本実験力学会編集委員会 編
No. or year of volume/issue
18(1):2018.3
Volume
18
Issue
1