高圧水素ガス環境用Cr-N薄膜ひずみセンサおよび圧力センサ (特集 平成29年度センサ・マイクロマシン部門総合研究会)
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- Material Type
- 記事
- Author/Editor
- 丹羽 英二三上 浩
- Series Title
- Alternative Title
- Strain Sensors and Pressure Sensors using Cr-N Thin Films for High Pressure Hydrogen Gas
- Periodical title
- 電気学会論文誌. E, センサ・マイクロマシン部門誌 = IEEJ transactions on sensors and micromachines
- No. or year of volume/issue
- 138(5):2018.5
- Volume
- 138
- Issue
- 5