イオンビーム加工による超高精度ミラーの製作 (特集 極限精度のミラー加工技術)
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- Material Type
- 記事
- Author/Editor
- 瀧野 日出雄
- Series Title
- Author Heading
- Alternative Title
- Fabrication of High Accurate Mirrors by Ion Beam Figuring
- Periodical title
- 精密工学会誌 = Journal of the Japan Society for Precision Engineering / 会誌編集委員会 編
- No. or year of volume/issue
- 84(6)=1002:2018.6
- Volume
- 84
- Issue
- 6