原子層堆積法の酸化ガスがAl₂O₃膜の電気特性へ及ぼす影響 (特集 2017年真空・表面科学合同講演会特集号(2))
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- Material Type
- 記事
- Author/Editor
- 生田目 俊秀木村 将之弓削 雅津也井上 万里池田 直樹大石 知司大井 暁彦
- Series Title
- Alternative Title
- Influence of Oxidant Gas of Atomic Layer Deposition on Electrical Characteristics of Al₂O₃ films
- Periodical title
- 表面と真空 = Vacuum and surface science / 日本表面科学会, 日本真空学会 編
- No. or year of volume/issue
- 61(5):2018.5
- Volume
- 61
- Issue
- 5