Digital data available(Japan Link Center)
Begin reading now
CiNii Research
Holdings of Libraries in Japan
This page shows libraries in Japan other than the National Diet Library that hold the material.
Please contact your local library for information on how to use materials or whether it is possible to request materials from the holding libraries.
Bibliographic Record
You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.
- Material Type
- 記事
- Author/Editor
- 井上 匡志内田 雄喜石本 浩一堀本 恭弘
- Series Title
- Alternative Title
- Optimized Design of Squeeze-film Damping Toward High SNR MEMS Microphone
- Periodical title
- 電気学会論文誌. E, センサ・マイクロマシン部門誌 = IEEJ transactions on sensors and micromachines
- No. or year of volume/issue
- 138(7):2018.7
- Volume
- 138
- Issue
- 7