Pd系金属ガラスを用いた高速応答・低消費電力容量型MEMS水素センサに関するレビュー (特集 第34回「センサ・マイクロマシンと応用システム」シンポジウム受賞論文)
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- Material Type
- 記事
- Author/Editor
- 山﨑 宏明林 裕美増西 桂小野 大騎池橋 民雄
- Series Title
- Alternative Title
- A Review of Capacitive MEMS Hydrogen Sensor using Pd based Metallic Glass with Fast Response and Low Power Consumption
- Periodical title
- 電気学会論文誌. E, センサ・マイクロマシン部門誌 = IEEJ transactions on sensors and micromachines
- No. or year of volume/issue
- 138(7):2018.7
- Volume
- 138
- Issue
- 7