Holdings of Libraries in Japan
This page shows libraries in Japan other than the National Diet Library that hold the material.
Please contact your local library for information on how to use materials or whether it is possible to request materials from the holding libraries.
other
CiNii Research
Search ServiceYou can check the holdings of institutions and databases with which CiNii Research is linked at the site of CiNii Research.
Bibliographic Record
You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.
- Material Type
- 記事
- Author/Editor
- 久住 孝幸中村 竜太越後谷 正見
- Alternative Title
- Development of the advanced polishing technology for next-generation semiconductor substrates using controlled slurry under AC electric field(5)
- Periodical title
- 業務年報 = Annual report of Akita Industrial Technology Center / 秋田県産業技術センター 編
- No. or year of volume/issue
- 2017年度
- Pages
- 98-101
- Publication date of volume/issue (W3CDTF)
- 2017
- ISSN (Periodical Title)
- 2187-3380