超音波センサに適した極薄PTFE層を有するシリカ凝集体エレクトレットの製作と特性評価
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- Material Type
- 記事
- Author/Editor
- 蔭山 健介折笠 健アハマド ザリフ アフィック ビン ジャマルディン坂井 建宣
- Author Heading
- Alternative Title
- Preparation and Characteristic Evaluation of Silica-agglomerate Electret with Ultra-thin PTFE Layer for Ultrasonic Sensor
- Periodical title
- 電気学会論文誌. E, センサ・マイクロマシン部門誌 = IEEJ transactions on sensors and micromachines
- No. or year of volume/issue
- 138(9):2018.9
- Volume
- 138
- Issue
- 9
- Pages
- 441-447