FCVA法によるホウ素含有炭素ターゲットを用いたta-C:B膜の成膜および300℃までのトライボロジー特性
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- Material Type
- 記事
- Author/Editor
- 根本 公紀梅原 徳次野老山 貴行村島 基之瀧本 裕治中道 健司
- Alternative Title
- Deposition of ta-C:B Coating by FCVA Using Boron Doped Target and Its Tribological Behaviors at Elevated Temperature up to 300℃
- Periodical title
- トライボロジスト = Journal of Japanese Society of Tribologists / 日本トライボロジー学会 編
- No. or year of volume/issue
- 63(10):2018
- Volume
- 63
- Issue
- 10
- Pages
- 699-705