難加工基板を対象としたプラネタリCMP法の研究
Digital data available（Japan Link Center）
Begin reading now
CiNii Research
Holdings of Libraries in Japan
This page shows libraries in Japan other than the National Diet Library that hold the material.
Please contact your local library for information on how to use materials or whether it is possible to request materials from the holding libraries.
other
CiNii Research
Search ServiceDigitalYou can check the holdings of institutions and databases with which CiNii Research is linked at the site of CiNii Research.
Bibliographic Record
You can check the details of this material, its authority (keywords that refer to materials on the same subject, author's name, etc.), etc.
- Material Type
- 記事
- Author/Editor
- 畝田 道雄藤井 皐司伊藤 諒平武田 秀俊會田 英雄
- Alternative Title
- Planetary motion-assisted chemical mechanical polishing method of difficult-to-process substrate
- Periodical title
- Abrasive technology : 砥粒加工学会誌 : journal of the Japan Society for Abrasive Technology
- No. or year of volume/issue
- 62(11)=435:2018.11
- Volume
- 62
- Issue
- 11
- Sequential issue number
- 435