Bibliographic Record
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- Material Type
- 記事
- Author/Editor
- 福田 涼正直 花奈子蒋 楠上杉 謙次郎林 侑介肖 世玉三宅 秀人
- Series Title
- Alternative Title
- Quality improvement and characteristic evaluations of sputter-deposited a-plane AlN on r-plane sapphire
- Periodical title
- 電子情報通信学会技術研究報告 = IEICE technical report : 信学技報
- No. or year of volume/issue
- 118(332):2018.11.29・30
- Volume
- 118
- Issue
- 332