招待講演 p型GaN上に形成した単結晶Al配線およびそのGaN FETへの応用 (シリコン材料・デバイス)

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招待講演 p型GaN上に形成した単結晶Al配線およびそのGaN FETへの応用

(シリコン材料・デバイス)

Call No. (NDL)
Z16-940
Bibliographic ID of National Diet Library
029576312
Material type
記事
Author
原田 剛史ほか
Publisher
東京 : 電子情報通信学会
Publication date
2019-02-07
Material Format
Paper
Journal name
電子情報通信学会技術研究報告 = IEICE technical report : 信学技報 118(438):2019.2.7
Publication Page
p.19-22
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Paper

Material Type
記事
Author/Editor
原田 剛史
宇高 孝二
神田 裕介
大西 克彦
松永 啓一
引田 正洋
上本 康裕
Alternative Title
Invited : Single Crystal Al Interconnects Formed on p-GaN and Their Application to GaN FET
Periodical title
電子情報通信学会技術研究報告 = IEICE technical report : 信学技報
No. or year of volume/issue
118(438):2019.2.7
Volume
118
Issue
438