Bibliographic Record
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- Material Type
- 記事
- Author/Editor
- 岡田 浩横山 太一三輪 清允山根 啓輔若原 昭浩関口 寛人
- Series Title
- Alternative Title
- Study of Fabrication Process for Nitride-based Semiconductor Integrated Circuits : Threshold voltage control by Si-ion implantation
- Periodical title
- 電子情報通信学会技術研究報告 = IEICE technical report : 信学技報
- No. or year of volume/issue
- 119(36):2019.5.16・17
- Volume
- 119
- Issue
- 36