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Bibliographic Record
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- Material Type
- 記事
- Author/Editor
- 高橋 英俊菅 哲朗中井 亮仁髙畑 智之下山 勲
- Alternative Title
- Angular acceleration sensor with spiral gas channel and piezoresistive cantilever
- Periodical title
- 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]
- No. or year of volume/issue
- 35:2018.10.30-11.1
- Volume
- 35
- Pages
- 3p
- Publication date of volume/issue (W3CDTF)
- 2018