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Bibliographic Record
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- Material Type
- 記事
- Author/Editor
- 矢作 徹村山 裕紀阿部 泰村上 穣岩松 新之輔加藤 睦人渡部 善幸峯田 貴
- Alternative Title
- Fabrication of multi-fin structure using MEMS process and shape transfer to resin materials
- Periodical title
- 「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]
- No. or year of volume/issue
- 35:2018.10.30-11.1
- Volume
- 35
- Pages
- 4p
- Publication date of volume/issue (W3CDTF)
- 2018