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雑誌電気学会研究会資料 SP
Volume number2019(1-23):2019.7.23・24
ArticleComparison...

Comparison study of plasma synthesis methods for TCO films manufacturing (放電・プラズマ・パルスパワー 静止器 開閉保護合同研究会・アークプラズマ・電気接点とその応用)

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Comparison study of plasma synthesis methods for TCO films manufacturing

(放電・プラズマ・パルスパワー 静止器 開閉保護合同研究会・アークプラズマ・電気接点とその応用)

Call No. (NDL)
Z43-244
Bibliographic ID of National Diet Library
029919160
Material type
記事
Author
Tihomir Cuzovicほか
Publisher
東京 : 電気学会
Publication date
2019-07
Material Format
Paper
Journal name
電気学会研究会資料. SP = The papers of technical meeting on switching and protecting engineering, IEE Japan / 開閉保護研究会 [編] 2019(1-23):2019.7.23・24
Publication Page
p.89-93
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Paper

Material Type
記事
Title
Comparison study of plasma synthesis methods for TCO films manufacturing
Author/Editor
Tihomir Cuzovic
Naoyuki Sato
Takashi Ikehata
Series Title
放電・プラズマ・パルスパワー 静止器 開閉保護合同研究会・アークプラズマ・電気接点とその応用
Author Heading
Tihomir Cuzovic
Naoyuki Sato
Takashi Ikehata
Alternative Title
透明酸化物生産に関するプラズマ合成法の比較研究 トウメイ サンカブツ セイサン ニ カンスル プラズマ ゴウセイホウ ノ ヒカク ケンキュウ
Periodical title
電気学会研究会資料. SP = The papers of technical meeting on switching and protecting engineering, IEE Japan / 開閉保護研究会 [編]
No. or year of volume/issue
2019(1-23):2019.7.23・24
Volume
2019
Issue
1-23