半導体製造装置における磁性流体シール技術の動向 (特集 半導体製造に関わるトライボロジー)
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- Material Type
- 記事
- Author/Editor
- 山本 祥高野 祥央
- Series Title
- Alternative Title
- Recent Trends in Magnetic Fluid Seal Technology for Semiconductor Manufacturing
- Periodical title
- トライボロジスト = Journal of Japanese Society of Tribologists / 日本トライボロジー学会 編
- No. or year of volume/issue
- 64(12):2019
- Volume
- 64
- Issue
- 12