第21回新金属協会受賞に寄せてシリコン結晶の不純物評価法の標準化に取り組んで

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Material Type: 記事
Title: 第21回新金属協会受賞に寄せてシリコン結晶の不純物評価法の標準化に取り組んで
Author/Editor: 田島道夫
Author Heading: 田島道夫
Periodical title: 新金属工業 / 新金属協会編
No. or year of volume/issue: 64(410):2020.春
Volume: 64
Issue: 410
Pages: 34-38
Publication date of volume/issue (W3CDTF): 2020
ISSN (Periodical Title): 0583-0419
ISSN-L (Periodical Title): 0583-0419
Publication (Periodical Title): 東京 : 新金属協会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZP41
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z17-347
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 030387714
http://id.ndl.go.jp/bib/030387714
Bibliographic Record Category (NDL): 632