Dimension Change during Multi-step Imprint Process and In-plain Compression

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Material Type: 記事
Title: Dimension Change during Multi-step Imprint Process and In-plain Compression
Author/Editor: Tsuyoshi Miyata
Kazuki Tokumaru
Fujio Tsumori
Author Heading: Tsuyoshi Miyata
Kazuki Tokumaru
Fujio Tsumori
Periodical title: Journal of photopolymer science and technology
No. or year of volume/issue: 33(2):2020
Volume: 33
Issue: 2
Pages: 199-204
Publication date of volume/issue (W3CDTF): 2020
ISSN (Periodical Title): 0914-9244
ISSN-L (Periodical Title): 0914-9244
Publication (Periodical Title): Chiba : The Society of Photopolymer Science and Technology
Place of Publication (Country Code): JP
Text Language Code: eng
Subject Heading: Nano imprint lithography
Multi-scale patterning
Hierarchical structure
NDLC: ZP48
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z53-W515
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 030413074
http://id.ndl.go.jp/bib/030413074
Bibliographic Record Category (NDL): 632