エリプソメトリック顕微鏡 : 斜め観測用光学顕微鏡の設計からその応用まで (特集 進化を続ける光学顕微鏡)
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CiNii Research
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- Material Type
- 記事
- Author/Editor
- 金 蓮花上原 誠ジェローズ ベルナール近藤 英一
- Series Title
- Author Heading
- Alternative Title
- Ellipsometric Microscope : Design and Application of a Microscope for Oblique Observation of Samples
- Periodical title
- 精密工学会誌 = Journal of the Japan Society for Precision Engineering / 会誌編集委員会 編
- No. or year of volume/issue
- 86(7)=1027:2020.7
- Volume
- 86
- Issue
- 7