光照射技術によるスパッタ成膜フレキシブル透明導電膜の特性向上(小特集先端レーザー表面処理技術)

Journal name: 表面技術 = Journal of the Surface Finishing Society of Japan 71(11):2020.11

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Material Type: 記事
Title: 光照射技術によるスパッタ成膜フレキシブル透明導電膜の特性向上
Author/Editor: 野本淳一
山口巖
中島智彦
土屋哲男
Series Title: 小特集先端レーザー表面処理技術
Author Heading: 野本淳一
山口巖
中島智彦
土屋哲男
Alternative Title: Characteristics Enhancement of Magnetron Sputtered Flexible Transparent Conductive Film by Excimer Laser Irradiation Technology
Periodical title: 表面技術 = Journal of the Surface Finishing Society of Japan
No. or year of volume/issue: 71(11):2020.11
Volume: 71
Issue: 11
Pages: 672-676
Publication date of volume/issue (W3CDTF): 2020-11
ISSN (Periodical Title): 0915-1869
ISSN-L (Periodical Title): 0915-1869
Publication (Periodical Title): 東京 : 表面技術協会
Place of Publication (Country Code): JP
Text Language Code: jpn
Subject Heading: Excimer Laser Irradiation
Transparent Conducting Oxide
Work Function Control
Buffer Layer
NDLC: ZP41
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z17-291
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 030772609
http://id.ndl.go.jp/bib/030772609
Bibliographic Record Category (NDL): 632