エンジニアの知識と機械学習の融合 : シリコンエピタキシャル成長プロセスへのベイズ最適化応用

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Material Type: 記事
Title: エンジニアの知識と機械学習の融合 : シリコンエピタキシャル成長プロセスへのベイズ最適化応用
Author/Editor: 沓掛健太朗
長田圭一
松井孝太
山本純
Author Heading: 沓掛健太朗
長田圭一
松井孝太
山本純
Alternative Title: Application of Bayesian optimization for experimental conditions of film deposition
Periodical title: 応用物理
No. or year of volume/issue: 89(12)=1021:2020.12
Volume: 89
Issue: 12
Sequential issue number: 1021
Pages: 711-714
Publication date of volume/issue (W3CDTF): 2020-12
ISSN (Periodical Title): 0369-8009
ISSN-L (Periodical Title): 0369-8009
Publication (Periodical Title): 東京 : 応用物理学会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZM17
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z15-243
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 030809708
http://id.ndl.go.jp/bib/030809708
Bibliographic Record Category (NDL): 632