Profile Measurement Using Confocal Chromatic Probe on Ultrahigh Precision Machine Tool
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- Material Type
- 記事
- Author/Editor
- Hao DuanShinya MoritaTakuya HosobataMasahiro TakedaYutaka Yamagata
- Periodical title
- International journal of automation technology
- No. or year of volume/issue
- 15(2)=82:2021.3
- Volume
- 15
- Issue
- 2
- Sequential issue number
- 82
- Pages
- 225-233