Volume number2019
散乱光方式による非接...

散乱光方式による非接触表面粗さ・形状検査事例

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散乱光方式による非接触表面粗さ・形状検査事例

Call No. (NDL)
Z74-F452
Bibliographic ID of National Diet Library
031472134
Material type
記事
Author
丸山 拓之ほか
Publisher
東京 : 日本光学測定機工業会
Publication date
2019
Material Format
Paper
Journal name
光計測シンポジウム論文集 2019
Publication Page
p.1-4
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Paper

Material Type
記事
Author/Editor
丸山 拓之
高尾 邦彦
矢尾板 達也
Alternative Title
Non-contact surface roughness and form inspection by scattering light method
Periodical title
光計測シンポジウム論文集
No. or year of volume/issue
2019
Pages
1-4
Publication date of volume/issue (W3CDTF)
2019
Publication (Periodical Title)
東京 : 日本光学測定機工業会