雑誌光計測シンポジウム論文集
Volume number2019
Articleスペックル干渉法を用...

スペックル干渉法を用いた回折限界を超えた三次元形状測定におけるゼロ次回折ビームの位相分布電磁場シミュレーション

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スペックル干渉法を用いた回折限界を超えた三次元形状測定におけるゼロ次回折ビームの位相分布電磁場シミュレーション

Call No. (NDL)
Z74-F452
Bibliographic ID of National Diet Library
031472160
Material type
記事
Author
-
Publisher
東京 : 日本光学測定機工業会
Publication date
2019
Material Format
Paper
Journal name
光計測シンポジウム論文集 2019
Publication Page
p.13-16
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Paper

Material Type
記事
Title
スペックル干渉法を用いた回折限界を超えた三次元形状測定におけるゼロ次回折ビームの位相分布電磁場シミュレーション
Alternative Title
Phase distribution electro-magnetic field simulation of zeroth-order diffraction beam in three-dimensional shape measurement beyond diffraction limit using speckle interferometry
Periodical title
光計測シンポジウム論文集
No. or year of volume/issue
2019
Pages
13-16
Publication date of volume/issue (W3CDTF)
2019
Publication (Periodical Title)
東京 : 日本光学測定機工業会
Place of Publication (Country Code)
JP
Text Language Code
jpn