SU-8ナノ加工を用いた光操作ナノニードルの開発

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SU-8ナノ加工を用いた光操作ナノニードルの開発

Call No. (NDL)
YH247-299
Bibliographic ID of National Diet Library
031480150
Material type
記事
Author
原田 雅彦ほか
Publisher
[東京] : Institute of Electrical Engineers of Japan
Publication date
2020-10
Material Format
Recording Media
Journal name
「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編] 37:2020.10.26-28
Publication Page
p.6p
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Recording Media

Material Type
記事
Author/Editor
原田 雅彦
高尾 英邦
下川 房男
寺尾 京平
Alternative Title
Development of optically-driven nanoneedles using SU-8 nanofabrication
Periodical title
「センサ・マイクロマシンと応用システム」シンポジウム論文集 電気学会センサ・マイクロマシン部門 [編]
No. or year of volume/issue
37:2020.10.26-28
Volume
37
Pages
6p
Publication date of volume/issue (W3CDTF)
2020-10