Fabrication of Tactile Display Mechanism Using Arrayed SMA Thick Film Actuator and Si TSV Layer with Individually Connecting Diode (特集 第37回「センサ・マイクロマシンと応用システム」シンポジウム受賞論文)
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- Material Type
- 記事
- Author/Editor
- Ryo SaitoYusuke KimuraJiale XuTakashi Mineta
- Series Title
- Author Heading
- Periodical title
- 電気学会論文誌. E, センサ・マイクロマシン部門誌 = IEEJ transactions on sensors and micromachines
- No. or year of volume/issue
- 141(7):2021.7
- Volume
- 141
- Issue
- 7
- Pages
- 260-264