ArFエキシマレーザにより作製されたシリコーンゴム上の周期的円柱状微細隆起構造 (特集 電子材料関連技術の最近の進展)
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- Material Type
- 記事
- Author/Editor
- 大越 昌幸
- Series Title
- Author Heading
- Alternative Title
- Periodic Cylindrical Structure of Micro-Swelling Silicone Rubber Fabricated by ArF Excimer Laser
- Periodical title
- 電気学会論文誌. C, 電子・情報・システム部門誌 = IEEJ transactions on electronics, information and systems
- No. or year of volume/issue
- 141(7):2021.7
- Volume
- 141
- Issue
- 7