α-Fe₂O₃バッファ層の挿入によるフレキシブルな合成雲母基板上へのα-Ga₂O₃薄膜のエピタキシャル成長 (特集 半導体エレクトロニクス)
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- Material Type
- 記事
- Author/Editor
- 新田 悠汰西中 浩之島添 和樹吉本 昌広
- Series Title
- Alternative Title
- Growth of Metastable α-Ga₂O₃ Epitaxial Thin Film on Flexible Synthetic Mica by Insertion α-Fe₂O₃ Buffer Layer
- Periodical title
- 材料 / 日本材料学会 [編]
- No. or year of volume/issue
- 70(10):2021.10
- Volume
- 70
- Issue
- 10