半導体製造工場で92時間の火災難燃材だったはずの装置きょう体に延焼か : 事故は語る

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Material Type: 記事
Title: 半導体製造工場で92時間の火災難燃材だったはずの装置きょう体に延焼か : 事故は語る
Periodical title: 日経ものづくり
No. or year of volume/issue: (806):2021.11
Issue: 806
Pages: 72-76
Publication date of volume/issue (W3CDTF): 2021-11
ISSN (Periodical Title): 1349-2772
ISSN-L (Periodical Title): 1349-2772
Publication (Periodical Title): 東京 : 日経BP社
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZM5
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z14-698
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 031792773
http://id.ndl.go.jp/bib/031792773
Bibliographic Record Category (NDL): 632