内部集光型レーザダイシングを用いたTEM試料作製の前処理手法

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Material Type: 記事
Title: 内部集光型レーザダイシングを用いたTEM試料作製の前処理手法
Author/Editor: 岩田博之
高木誠
坂公恭
Author Heading: 岩田博之
高木誠
坂公恭
Alternative Title: Pre-treatment with Stealth Type Laser Dicing for TEM Sample Preparation
Periodical title: 顕微鏡 = Microscopy / 「顕微鏡」編集委員会編
No. or year of volume/issue: 56(3):2021
Volume: 56
Issue: 3
Pages: 139-142
Publication date of volume/issue (W3CDTF): 2021
ISSN (Periodical Title): 1349-0958
ISSN-L (Periodical Title): 1349-0958
Publication (Periodical Title): 東京 : 日本顕微鏡学会
Place of Publication (Country Code): JP
Text Language Code: jpn
Subject Heading: TEM試料作製
イオンミリング
イオンスライサー
ステルスダイシング
レーザダイシング
NDLC: ZN33
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-896
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 031942039
http://id.ndl.go.jp/bib/031942039
Bibliographic Record Category (NDL): 632