透明導電膜スパッタ成膜プロセスの基礎

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Material Type: 記事
Title: 透明導電膜スパッタ成膜プロセスの基礎
Author/Editor: 重里有三
岡伸人
Author Heading: 重里有三
岡伸人
Alternative Title: Sputtering processes to deposit various transparent conductive oxide films
Periodical title: 応用物理
No. or year of volume/issue: 91(3)=1036:2022.3
Volume: 91
Issue: 3
Sequential issue number: 1036
Pages: 160-163
Publication date of volume/issue (W3CDTF): 2022-03
ISSN (Periodical Title): 0369-8009
ISSN-L (Periodical Title): 0369-8009
Publication (Periodical Title): 東京 : 応用物理学会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZM17
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z15-243
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 032026990
http://id.ndl.go.jp/bib/032026990
Bibliographic Record Category (NDL): 632