単結晶ダイヤモンド製圧子を用いた超音波援用マイクロプレス加工によるマイクロレンズアレイ金型の超精密成形

Journal name: 天田財団助成研究成果報告書 = Report of grant-supported researches the Amada Foundation 35:2022

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Material Type: 記事
Title: 単結晶ダイヤモンド製圧子を用いた超音波援用マイクロプレス加工によるマイクロレンズアレイ金型の超精密成形
Author/Editor: 鈴木浩文
Author Heading: 鈴木浩文
Periodical title: 天田財団助成研究成果報告書 = Report of grant-supported researches the Amada Foundation
No. or year of volume/issue: 35:2022
Volume: 35
Pages: 161-165
Publication date of volume/issue (W3CDTF): 2022
ISSN (Periodical Title): 2434-0723
ISSN-L (Periodical Title): 2434-0723
Publication (Periodical Title): 伊勢原 : 天田財団
Place of Publication (Country Code): JP
Text Language Code: jpn
Subject Heading: インデンテーション
超音波振動
単結晶ダイヤモンド圧子
マイクロアレイ金型
超精密成形
NDLC: ZP41
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z74-H914
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 032658648
http://id.ndl.go.jp/bib/032658648
Bibliographic Record Category (NDL): 632