フレキシブルファイバーコンディショナによる研磨パッドの表面性状再生法の「見える化」とそのメカニズム考察 (特集 砥石や研磨パッドの成形とその効果)

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フレキシブルファイバーコンディショナによる研磨パッドの表面性状再生法の「見える化」とそのメカニズム考察

(特集 砥石や研磨パッドの成形とその効果)

Call No. (NDL)
Z16-1147
Bibliographic ID of National Diet Library
032669740
Material type
記事
Author
畝田 道雄ほか
Publisher
東京 : 砥粒加工学会
Publication date
2023-02
Material Format
Paper
Journal name
Abrasive technology : 砥粒加工学会誌 : journal of the Japan Society for Abrasive Technology 67(2)=486:2023.2
Publication Page
p.71-74
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Paper

Material Type
記事
Author/Editor
畝田 道雄
藤田 隆
新井 雄太郎
Alternative Title
Visualization of novel polishing pad conditioning method by flexible fiber conditioner
Periodical title
Abrasive technology : 砥粒加工学会誌 : journal of the Japan Society for Abrasive Technology
No. or year of volume/issue
67(2)=486:2023.2
Volume
67
Issue
2