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CiNii Research
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Bibliographic Record
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- Material Type
- 記事
- Author/Editor
- 太田 貴之
- Author Heading
- Alternative Title
- Development of high-speed deposition technique of diamond-like carbon film by high power pulse sputtering
- Periodical title
- 名城大学総合研究所紀要 = Bulletin of Research Institute of Meijo University / 名城大学総合研究所 編
- No. or year of volume/issue
- (27):2022
- Issue
- 27
- Pages
- 1-4
- Publication date of volume/issue (W3CDTF)
- 2022