UV改質セミアディティブ工程を用いた基板平滑表面への微細配線形成

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Material Type: 記事
Title: UV改質セミアディティブ工程を用いた基板平滑表面への微細配線形成
Author/Editor: 西田昌貴
乃万裕一
岩倉哲郎
山口真樹
満倉一行
Author Heading: 西田昌貴
乃万裕一
岩倉哲郎
山口真樹
満倉一行
Alternative Title: Fine line formation on smooth substrate by UV modified semi-additive process
Periodical title: マイクロエレクトロニクスシンポジウム論文集
No. or year of volume/issue: 32:2022.9.5-7
Volume: 32
Pages: 291-294
Publication date of volume/issue (W3CDTF): 2022-09
Publication (Periodical Title): 東京 : エレクトロニクス実装学会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN33
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-1617
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 033132285
http://id.ndl.go.jp/bib/033132285
Bibliographic Record Category (NDL): 632