CMOSイメージセン...

CMOSイメージセンサ向け界面準位低減効果を有する新たな機能性シリコンウェーハの研究

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CMOSイメージセンサ向け界面準位低減効果を有する新たな機能性シリコンウェーハの研究

Call No. (NDL)
Z15-243
Bibliographic ID of National Diet Library
033255876
Material type
記事
Author
奥山 亮輔
Publisher
東京 : 応用物理学会
Publication date
2024-01
Material Format
Paper
Journal name
応用物理 93(1)=1058:2024.1
Publication Page
p.33-37
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Paper

Material Type
記事
Author/Editor
奥山 亮輔
Author Heading
Alternative Title
Study on new functional silicon wafers with reduction effect of interface state density for CMOS image sensors
Periodical title
応用物理
No. or year of volume/issue
93(1)=1058:2024.1
Volume
93
Issue
1
Sequential issue number
1058