雑誌Readout : Horiba technical reports
Volume number58号 2024年5月
ArticleDevelopmen...

Development of a Compact Deep-Ultraviolet Laser Source for Precision Microstructure Measurement (特集 次世代半導体デバイスの開発に貢献する分析・計測技術 2023堀場雅夫賞)

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Development of a Compact Deep-Ultraviolet Laser Source for Precision Microstructure Measurement

(特集 次世代半導体デバイスの開発に貢献する分析・計測技術 2023堀場雅夫賞)

Call No. (NDL)
Z14-1710
Bibliographic ID of National Diet Library
033590908
Material type
記事
Author
KUSHIMOTO Maki
Publisher
京都 : 堀場製作所
Publication date
2024-05
Material Format
Paper
Journal name
Readout : Horiba technical reports (58):2024.5
Publication Page
p.36-40
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Paper

Material Type
記事
Title
Development of a Compact Deep-Ultraviolet Laser Source for Precision Microstructure Measurement
Author/Editor
KUSHIMOTO Maki
Series Title
特集 次世代半導体デバイスの開発に貢献する分析・計測技術 2023堀場雅夫賞
Author Heading
KUSHIMOTO Maki
Alternative Title
微細構造計測に向けた小型深紫外レーザー光源の開発 ビサイ コウゾウ ケイソク ニ ムケタ コガタシンシガイ レーザー コウゲン ノ カイハツ
Periodical title
Readout : Horiba technical reports
No. or year of volume/issue
(58):2024.5
Issue
58
Pages
36-40