直流アーク放電反応性...

直流アーク放電反応性プラズマ蒸着法 (小特集 ドライプロセスの最新動向)

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直流アーク放電反応性プラズマ蒸着法

(小特集 ドライプロセスの最新動向)

Call No. (NDL)
Z17-291
Bibliographic ID of National Diet Library
033622508
Material type
記事
Author
山本 哲也ほか
Publisher
東京 : 表面技術協会
Publication date
2024-07
Material Format
Paper
Journal name
表面技術 = Journal of the Surface Finishing Society of Japan 75(7):2024.7
Publication Page
p.304-309
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Bibliographic Record

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Paper

Material Type
記事
Author/Editor
山本 哲也
北見 尚久
前原 誠
岡田 悠悟
木下 公男
Alternative Title
Reactive Plasma Deposition with DC Arc Discharge
Periodical title
表面技術 = Journal of the Surface Finishing Society of Japan
No. or year of volume/issue
75(7):2024.7
Volume
75
Issue
7