32nmノード以降の計測技術 (全冊特集 45nm/32nm世代の半導体製造・試験装置)

32nmノード以降の計測技術

(全冊特集 45nm/32nm世代の半導体製造・試験装置)

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Material Type: 記事
Title: 32nmノード以降の計測技術
Author/Editor: 河村栄一
Series Title: 全冊特集 45nm/32nm世代の半導体製造・試験装置
Author Heading: 河村栄一
Periodical title: 電子材料
No. or year of volume/issue: 48(3) 2009.3
Volume: 48
Issue: 3
Pages: 16～26
Publication date of volume/issue (W3CDTF): 2009-03
ISSN (Periodical Title): 0387-0774
ISSN-L (Periodical Title): 0387-0774
Publication (Periodical Title): 東京 : 工業調査会
Place of Publication (Country Code): JP
Text Language Code: jpn
NDLC: ZN33
Target Audience: 一般
Holding library: 国立国会図書館
Call No.: Z16-225
Data Provider (Database): 国立国会図書館 : 国立国会図書館雑誌記事索引
https://ndlsearch.ndl.go.jp
Bibliographic ID (NDL): 10187837
http://id.ndl.go.jp/bib/10187837
Bibliographic Record Category (NDL): 632