Deposition and wear resistance of composite TiBC-SiC coatings on Si wafer by thermal plasma CVD (Feature: Advanced material processing for ceramics)
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- Material Type
- 記事
- Title
- Author/Editor
- Shiro ShimadaYusuke FujiHajime Kiyono 他
- Author Heading
- Periodical title
- Journal of the Ceramic Society of Japan = 日本セラミックス協会学術論文誌
- No. or year of volume/issue
- 117(1364) 2009.4
- Volume
- 117
- Issue
- 1364
- Pages
- 415～420